Investigations of the Measurement of Micro Geometries with Large Tactile CMMs and Application at a Micro-CT Artefact

摘要

Investigations are described to measure micro-geometries by means of a large tactile coordinate measuring machine (CMM). The influence of the contacting force is investigated experimentally and the influence of form deviations on the measurement uncertainty is determined. At the example of a standard for micro computed tomography ((mu)CT) the measurement results of different tactile CMMs and a (mu)CT are compared.