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Dynamics of the leveling process of nanoindentation induced defects on thin polystyrene films

机译:聚苯乙烯薄膜上纳米压痕诱发缺陷的流平过程动力学

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摘要

Using Atomic Force Microscopy (AFM) we study the effect of nanoindentation induced defects on 50 and 120 nm thick unentanaled polystyrene (PS) films, spin cast on silicon (Si) substrates. Indents with residual depths of penetration less than the film thickness level upon heating above the glass transition temperature (Tg) of bulk PS. The resulting leveling process is discussed in terms of a diffusion process driven by the curvature gradient. Calculated diffusivity values are close to the self-diffusivity of bulk PS. (C) 2001 Elsevier Science Ltd. All rights reserved. [References: 24]
机译:使用原子力显微镜(AFM),我们研究了纳米压痕诱导的缺陷对50和120 nm厚的无痕聚苯乙烯(PS)薄膜的影响,该薄膜旋铸在硅(Si)衬底上。在加热到块状PS的玻璃化转变温度(Tg)以上时,残留的穿透深度小于薄膜厚度的凹口。根据由曲率梯度驱动的扩散过程来讨论最终的平整过程。计算得出的扩散率值接近于整体PS的自扩散率。 (C)2001 Elsevier ScienceLtd。保留所有权利。 [参考:24]

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