Study of porosity and stiffness measurement of nanoporous aerogel films with wideband ultrasonic surface waves

摘要

Nanoporous aerogel films are of great scientific and commercial interest because of their outstanding potential for application to microelectronic interconnect, associated with low dielectric constant. Of the parameters which describe such aerogel films, density/porosity and stiffness are two of the most critical, but are difficult to measure. This paper shows how measurement of the dispersion of laser-generated surface acoustic wavepackets travelling on submicron-thick aerogel films on silicon substrates allows the density and Young's modulus to be extracted reliably, Particular attention is paid to accuracy of measurements and sensitivity to input data; and a method for extracting measurements on very thin films (<300 nm) is presented. (C) 2002 Elsevier Science B.V. All rights reserved. [References: 15]