Technologies of perforation of closely spaced micron holes with the help of neodymium - LiF:F-2(-) lasers

摘要

The picosecond (based on Nd:YLF-LiF:F-2(-) crystals) and nanosecond (Nd:YAG-LiF:F-2(-)) laser technologies are proposed for perforating closely spaced micron holes in aluminium foil for microelectronics, medicine, and biology. Two-dimensional matrices of holes with diameters of 2 - 20 mu m spaced from each other by 8 - 30 mu m are obtained in 20-mu m-thick aluminium foil. It is shown that it is possible to increase the hole density and decrease their diameter by controlling the laser irradiation regime. A sample of perforated aluminium foil is obtained with the total area of micron holes comprising 30% of the entire surface.