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Effect of grain boundary character of multicrystalline Si on external and internal (phosphorus) gettering of impurities

机译:多晶硅的晶界特性对杂质内外(磷)吸杂的影响

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We investigated the effect of the grain boundary (GB) character of multicrystalline Si (mc-Si) on the efficiency of external and internal gettering of impurities during phosphorus diffusion gettering (PDG). We utilized seed crystals with an artificially designed GB configuration to grow mc-Si ingots with different artificial GB characters. PDG combined with an originally developed multiple-cycle gettering technique at low temperature was introduced on intentionally Fe-contaminated mc-Si samples to enhance external and internal gettering. A significant positive PDG effect was observed after PDG combined with the multiple-cycle technique, as evidenced by the increase in lifetimes after PDG. A bright cloud-like photoluminescence signal around contaminated GBs was observed for artificial sigma 5-GBs and tilt-GBs after PDG, suggesting the enhancement of the internal gettering efficiency by leaving a cleaner area around the GBs. This result suggests the importance of the control of crystal defect character as well as impurities in mc-Si ingots, which could strongly affect the PDG efficiency. Copyright (c) 2016 John Wiley & Sons, Ltd.
机译:我们研究了磷扩散吸杂(PDG)过程中多晶硅(mc-Si)的晶界(GB)特性对杂质内部和外部吸杂效率的影响。我们利用具有人工设计的GB配置的晶种来生长具有不同人工GB特性的mc-Si锭。 PDG与最初开发的低温多周期吸气技术相结合,被引入有意地被Fe污染的mc-Si样品上,以增强内部和外部吸杂。 PDG与多周期技术相结合后,观察到了显着的PDG阳性效应,这可以通过PDG寿命的增加来证明。在PDG之后,对于人工sigma 5-GB和倾斜GB,在受污染的GB周围观察到明亮的云状光致发光信号,这表明通过在GB周围保留较干净的区域可以增强内部吸杂效率。该结果表明控制晶体缺陷特征以及mc-Si锭中杂质的重要性,这可能会严重影响PDG效率。版权所有(c)2016 John Wiley&Sons,Ltd.

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