A flexure-based electromagnetic nanopositioning actuator with predictable and re-configurable open-loop positioning resolution

摘要

This paper presents a novel cylindrical-shaped Flexure-based Electromagnetic Linear Actuator (FELA) that exhibits predictable and re-configurable open-loop positioning resolution. By combining contactless Lorentz-force actuation and frictionless flexure-based supporting bearings, it produces high repeatable motion and sub-micron positioning resolution. In this paper, the design concept of this cylindrical-shaped FELA will be introduced. It focuses on the modeling of the flexure-based supporting bearings, the thermal modeling of the electromagnetic module, and the unique characteristics of FELA, i.e., predictable and reconfigurable open-loop positioning resolution. A prototype was developed to evaluate the performance and demonstrate these unique characteristics of this new class of nanopositioning actuator. (C) 2015 Elsevier Inc. All rights reserved.