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Laser photochemical process of diazonaphthoquinone photopolymer

机译:重氮萘醌光聚合物的激光光化学过程

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摘要

Recent years, as rapid development of information science and technology, the study on light information storing material has become an important field. An intense focused monochromatic Ar~+ laser light as the excitation source was sued for exposure of photoresist. The photoresist of diazonaphthoquinone system is the key material for manufacture of the laser recording original disc, micro electric devices, ultra-large-scale integration of high resolution and lithography. The laser photochemical behavior of diazonaphthoquinone photopolymer by exposure of Ar~+ laser was discussed. The sensitive process was studied by laser fluorescence spectrum and laser induced fluorescence attenuation method. The nonlinear relation between photodecomposition rate of photopolymer and laser power, concentration of solution was investigated. Laser characteristic curve and photosensitivity of photopolymer were calculated.
机译:近年来,随着信息科学技术的飞速发展,光信息存储材料的研究已成为重要的领域。为了激发光致抗蚀剂,使用了强烈聚焦的单色Ar +激光作为激发源。重氮萘醌体系的光致抗蚀剂是制造激光记录原盘,微电子设备,高分辨率和光刻的超大规模集成的关键材料。讨论了重氮萘醌光聚合物通过Ar〜+激光的激光光化学行为。通过激光荧光光谱和激光诱导荧光衰减方法研究了感光过程。研究了光敏聚合物的光解速率与激光功率,溶液浓度之间的非线性关系。计算了光敏聚合物的激光特性曲线和光敏性。

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