Modelling for the optimization of the reaction chamber in silicon nanoparticle synthesis by a radio-frequency induction thermal plasma

摘要

The optimization of the reaction chamber for the silicon nanoparticle synthesis process by a radio-frequency induction thermal plasma is addressed using a plasma thermo-fluid-dynamic model coupled with electromagnetic field equations and with a moment model for nanoparticle transport. Various reaction chamber geometries composed of two parts - a conical top and a cylindrical bottom - are evaluated in terms of the yield of the synthesis process, the presence of recirculation flow patterns that may affect the uniformity of the produced nanoparticles and the size distribution of nanoparticles at the chamber outlet. Turbulent diffusion is suggested as the physical phenomenon that leads to nanoparticle deposition onto the walls of the reaction chamber. The injection of a suitable gas along the walls of the reaction chamber at the axial position, where the nanoparticle nucleation takes place, is proven to be effective in increasing the synthesis process yield.