Study of the first pulse of Ne-Xe-HCI dielectric barrier discharge for the excimer lamp

摘要

A global one-dimensional model of a dielectric barrier discharge which includes the sheath region and the positive column was developed. The model was used to study the electrical properties under operating conditions of the vacuum ultraviolet excimer lamp and to understand the basic processes of plasma kinetics. A 0.5 cm interelectrode gap distance is filled with a Ne-Xe-HC1 mixture. Time variations of the charged particles and excited species in the positive column were described. Then the one-dimensional model was used in the cathode region to illustrate (i) the spatio-temporal behavior of electronic and ionic densities and the electric field, and (ii) the time variation of the voltage, the current, and secondary currents due to ion and photon (X=172 nm) impact on the cathode. It shows a good resolution inside the sheath at high pressure and it correctly predicts the waveform of the discharge behavior. The obtained results have been discussed and analyzed