Excimer lamp comprises a discharge vessel including a discharge space, which contains xenon-containing filling gas that is produced with dielectric discharge excimer molecule, where the quartz glasses consist of hydrogen and chlorine

摘要

The excimer lamp comprises a discharge vessel including a discharge space (3), which contains xenon-containing filling gas that is produced with a dielectric discharge excimer molecule having an emission wavelength of 172 nm, where the discharge vessel consists of synthetically produced quartz glasses in a region of an emission window, and the quartz glasses contain hydroxyl groups (1100 wt.%-parts per million(ppm)). The quartz glasses of the emission window: are produced by a flame hydrolysis of silicon feedstock and direct glazing; and consist of hydrogen. The excimer lamp comprises a discharge vessel including a discharge space (3), which contains xenon-containing filling gas that is produced with a dielectric discharge excimer molecule having an emission wavelength of 172 nm, where the discharge vessel consists of synthetically produced quartz glasses in a region of an emission window, and the quartz glasses contain hydroxyl groups (1100 wt.%- parts per million(ppm)). The quartz glasses of the emission window: are produced by a flame hydrolysis of silicon feedstock and direct glazing; consist of hydrogen (less than 2 x 10 1 6molecule/cm 3to 4 x 10 1 7molecule/cm 3), chlorine (less than 0.1 wt.%-ppm), silicon hydride groups (less than 5 x 10 1 6molecule/cm 3); and have a fictive temperature of 950[deg] C. Silicon-containing insert material is free from chlorine. The emission window has an initial transmission (T 0) during an irradiation with incoherent and continuous excimer radiation, and a transmission drop (delta v) at a maximum transmission loss (T v) during continuous radiation, where the delta vis greater than 0.95 x T 0.