Study on Various Rectifiers for Fan-Filter Unites

摘要

The face velocities of the high efficiency particulate air filters and the ultra low penetration air filters in fan -filter units (FFUs) have large relative standard deviation and turbulivity. It seriously affects the unidi- rectivity of the flow in the unidirectional flow clean zone and cleanroom. The cross contamination in this kind of unidirectional flow area is hardly controlled. It is significant to find optional method for keeping the face velocity uniformity of FFU and reducing the face velocity turbulivity of FFU, furthermore, to keep the cleanliness level under FFUs.