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The Influence of Normal Crack on Detachment of Hard Thin Film

机译:法向裂纹对硬质薄膜剥离的影响

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摘要

Recently, hard thin films are often used to improve the tribological performance of machine elements or cutting tools. When the films are subjected to sliding, cracks are often generated by a normal and a friction forces because of the brittle nature of the films. However it has been unknown that whether or not the cracks affect the detachment phenomena of the films from the substrate, which cause drastic deterioration of the sliding surfaces. In this paper a stress analysis of both several hard thin films and the substrates, especially the analysis of the interface between them, is conducted to examine the influence of a crack existing in the film on the detachment of the film. The crack is supposed to be normal to the sliding surfaces since the film thickness is very thin compared to the contact width. A two dimensional FEM method is used for the analysis. The calculated results suggest that the normal crack greatly affects the detachment phenomena of the films under the conditions of high coefficient of friction and thinner film thickness. On the other hand the crack chip is closed and has no influence on the detachment phenomena when the film is thick even if such normal crack is present. The detachment of the film is dependent on the coefficient of friction.
机译:近来,硬质薄膜通常用于改善机械元件或切削工具的摩擦学性能。当薄膜经受滑动时,由于薄膜的脆性,经常在法向力和摩擦力的作用下产生裂纹。然而,还不知道裂纹是否影响膜从基板上的剥离现象,这会导致滑动表面的急剧劣化。在本文中,对几种硬质薄膜和基材进行应力分析,尤其是对它们之间的界面进行分析,以检查薄膜中存在的裂纹对薄膜剥离的影响。由于与接触宽度相比膜厚度非常薄,所以认为裂纹垂直于滑动表面。分析使用了二维有限元方法。计算结果表明,在高摩擦系数和较薄的膜厚条件下,法向裂纹对膜的剥离现象有很大影响。另一方面,即使存在这种正常的裂纹,当膜厚时,裂纹碎片是闭合的,并且对剥离现象没有影响。薄膜的分离取决于摩擦系数。

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