Flexible-substrate Fluxgate Current Sensor Based on MEMS Technology

摘要

A method of preparing a flexible-substrate fluxgate based on MEMS technology was proposed, and the prepared flexible-substrate fluxgate was applied as a current sensor for online measurement. On the basis of MEMS technology, we combined the high precision and high stability of the fluxgate with the flexible and extension characteristics of the substrate to prepare a fluxgate current sensor. This flexible-substrate fluxgate current sensor not only has high precision, but also has the advantage of convenient online measurement of a Rogowski coil.