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Ultrathin and Flexible Self-powered Temperature Sensor Based on Sputtered Tellurium Nanoparticles

机译:基于溅射碲纳米粒子的超薄和柔性自动温度传感器

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摘要

The energy crisis has worsened with the increase in population; to overcome this crisis, self-powered devices are required urgently. Human beings have also become increasingly health conscious and require modern equipment to monitor their body conditions. Body temperature is a measure of the thermoregulation in the body and also indicates other health conditions. For continuous body temperature monitoring, smart sensors are the best choice. In this work, we fabricate an ultrathin (150 nm) and flexible temperature sensor using thermoelectric tellurium nanoparticles (Te-NPs) sputtered on a thin Al substrate that can detect the exact surface temperature relative to its ambient temperature measurement. The sensor can sense both hot and cold surfaces and shows a linear response with increasing or decreasing temperature measurement. Because of its compact size and flexibility, it can conform to any surface for temperature. For a temperature gradient of 75 °C, the sensor gives an output voltage of 0.4 mV and can even accurately measure body temperature with only a human finger touch. Such a flexible and thin device can be used in the day-to-day monitoring of the human body or any other surface whose temperature should be determined before touching it.
机译:能源危机随着人口的增加而恶化;为了克服这种危机,迫切需要自动设备。人类也变得越来越健康,需要现代设备来监测他们的身体状况。体温是体内温度调节的量度,并且还表明了其他健康状况。对于连续体温监测,智能传感器是最佳选择。在这项工作中,我们使用在薄的Al底物上溅射的热电碲纳米颗粒(TE-NP)制造超薄(150nm)和柔性温度传感器,其可以检测相对于其环境温度测量的精确表面温度。传感器可以感测热和冷表面并显示出随温度测量的增加或降低的线性响应。由于其紧凑的尺寸和灵活性,它可以符合任何表面的温度。对于75°C的温度梯度,传感器可提供0.4 mV的输出电压,并且甚至可以用人的手指触摸准确地测量体温。这种柔性且薄的装置可用于人体的日常监测或任何其他表面,其温度应该在接触它之前确定。

著录项

  • 来源
    《Sensors and materials》 |2020年第8期|2577-2584|共8页
  • 作者单位

    Institute of NanoEngineering and Microsystems National Tsing Hua University Hsinchu 30013 Taiwan;

    Institute of Biomedical Engineering National Tsing Hua University Hsinchu 30013 Taiwan Department of Power Mechanical Engineering National Tsing Hua University Hsinchu 30013 Taiwan;

    Institute of NanoEngineering and Microsystems National Tsing Hua University Hsinchu 30013 Taiwan Department of Power Mechanical Engineering National Tsing Hua University Hsinchu 30013 Taiwan;

  • 收录信息 美国《科学引文索引》(SCI);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    temperature detection; self-powered sensor; tellurium nanoparticles; thermoelectric effect; flexibility; ultrathin device;

    机译:温度检测;自动传感器;碲纳米粒子;热电效应;灵活性;超薄装置;

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