A Drive Control Method for Silicon Micro-gyroscopes

摘要

To stabilize the frequency and amplitude of drive output, we designed a double closed-loop control loop, in which a PLL is used to stabilize the frequency of the drive output and an AGC is used to stabilize the amplitude of the drive output. The drive control method for a second-order-FLL-assisted third-order PLL is further proposed to improve the tracking frequency. Simulation results show that the tracking speed and stability accuracy of the proposed second-order-FLL-assisted third-order PLL are higher than those of a third-order PLL. Finally, the performance of the proposed method was tested on a digital ASIC platform. Experimental results show the advantages of our designed drive control system in terms of spectrum analysis. Moreover, our proposed method performed better than some other published methods in terms of stabilization precision.