Numerical Development of ZnO/Quartz Love Wave Structure for Gas Contamination Detection

摘要

Love wave structures are encouraging devices for sensing applications in gaseous or liquid media because of their high sensitivity. In this paper, we first investigate basic properties of a ZnO/quartz Love wave device by the use of theoretical considerations in order to get a good gas sensor. Second, experimental results of the developed structure, ZnO(2.1 mum)/90deg ST-cut quartz, confirm the suitable characteristics, including temperature compensation, high electromechanical coupling coefficient, and good sensitivity to mass loading effect. We finally characterize the gas effect on the photoresist Shipley S1805 with the above structure, and thus we confirm our approach