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Photolithography-free fabrication of organic light-emitting diodes for lighting applications

机译:用于照明应用的无光刻法制造有机发光二极管

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摘要

We investigate the photolithography-free fabrication of organic light-emitting diodes (OLEDs) for lighting applications with an attempt to embed the deposition and patterning process of an indium-tin-oxide (ITO) anode and insulating layer into an in-line-type organic evaporation system. This scheme inevitably brings in leakage current induced by the spike-like surface of ITO. To suppress it, we cover the ITO edges with three different insulation materials (i.e. sputter-deposited inorganic Al_2O_3 thin film, monomer (polymer) thin film deposited by organic acrylate evaporation or thermally evaporated organic insulation layer (tris-(8-hydroxyquinoline) aluminum (Alq_3))). Although small-molecule organic insulation materials that can be thermally evaporated are the most suitable for such a cost-effective fabrication process, yet their insulation capability is low due to the carrier transporting property. In this paper, we demonstrate that it can be boosted to a great extent with an increase of their thickness. It is likely that pinholes existing on the Al_2O_3 thin film act as leak channels, degrading the device performance. We also verify that the insulation capability of polymer fabricated by organic acrylate evaporation is just comparable with that of polyimide (PI) insulator patterned using a standard photolithography process.
机译:我们研究了用于照明应用的无光刻法有机发光二极管(OLED)的制造方法,试图将铟锡氧化物(ITO)阳极和绝缘层的沉积和构图过程嵌入成线型有机蒸发系统。该方案不可避免地引入由ITO的尖峰状表面引起的泄漏电流。为了抑制它,我们用三种不同的绝缘材料(即溅射沉积的无机Al_2O_3薄膜,通过有机丙烯酸酯蒸发或热蒸发的有机绝缘层(三-(8-羟基喹啉)铝)沉积的单体(聚合物)薄膜覆盖ITO边缘) (Alq_3))。尽管可以热蒸发的小分子有机绝缘材料最适合于这种具有成本效益的制造工艺,但是由于载流子的传输特性,其绝缘能力很低。在本文中,我们证明了随着厚度的增加,它可以在很大程度上得到增强。 Al_2O_3薄膜上存在的针孔可能会充当泄漏通道,从而降低器件性能。我们还验证了通过有机丙烯酸酯蒸发制造的聚合物的绝缘能力与使用标准光刻工艺构图的聚酰亚胺(PI)绝缘子的绝缘能力相当。

著录项

  • 来源
    《Semiconductor science and technology》 |2013年第2期|9.1-9.5|共5页
  • 作者

    I H Seo; J W Park; D C Shin;

  • 作者单位

    Department of Advanced Material Engineering, Chosun University, Gwangju 501-759, Korea;

    School of Electrical, Electronics & Communication Engineering, Korea University of Technology and Education, Cheonan 330-708, Korea;

    Department of Advanced Material Engineering, Chosun University, Gwangju 501-759, Korea;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

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