Impact of core thickness and gate misalignment on rectangular core-shell based double gate junctionless field effect transistor

摘要

A rectangular core is inserted in double gate junctionless transistor (DGJLT) which separates the top shell and bottom shell in the device called as rectangular core-shell double gate junctionless transistor (RCS-DGJLT). The core doping and core thickness are optimized to improve the performance of RCS-DGJLT. The core thickness is optimized for different shell thicknesses in the device which has not been explored yet in the literature. An interesting observation is found that the core thickness should be equal to the shell thickness for smaller shell thicknesses, whereas the thicker core is required for larger shell thicknesses. RCS-DGJLT has shown remarkable improvement than DGJLT. Further, the effect of gate misalignment on either side (source/drain) of the channel in RCS-DGJLT and DGJLT is studied and compared on the basis of device performance. The study of gate misalignment becomes essential due to the complications on achieving perfectly aligned gates during the fabrication of double gate device. An RCS-DGJLT is found to have better tolerance to gate misalignment than DGJLT. The best parametric values like OFF current is similar to 10(-16)A, ON current is similar to 10(-5)A, subthreshold slope is nearly 66.2 mV/decade, ON/OFF current ratio is similar to 10(10), drain induced barrier lowering is similar to 42.1 mV V-1 and threshold voltage similar to 0.56 V at perfectly aligned gate condition is obtained on keeping core and shell thickness at 3 nm each. As per the analysis, the gate misalignment up to 20% on either side of the channel does not impact the performance parameters much and hence reduces the stress of meeting the requirement of perfect gate alignment.