Mask Transfer System Aids Inspection, Reduces Damage

摘要

As dimensions shrink steadily toward the 100 nm region and below, and semiconductor devices become more complicated and multilayered, it is no surprise that the price of photomasks is skyrocketing, with the cost for plates going beyond the $50,000 region. A corollary of this becomes the handling of photomasks for shipping, incoming inspection, as well as insertion and removal from the stepper.