New SEMI MEMS Standard-Hermeticity Evaluation

摘要

Semi has announced the latest in the series of MEMS standards, MS8- Guide to Evaluating Hermeticity of MEMS Packages, available to users on-line immediately and on CD in early spring. Ron Foster of axept, LLC chaired the committee that drafted and wrote the new standard. "The hermeticity guide is the first to address MEMS packaging," according to Mr. Foster, "and we anticipate further efforts to standardize the methods used to evaluate MEMS packaging and the types of packages used in an effort to make MEMS more economical for manufacturers, users and consumers."