Preparation of patterned SiC and SiCN microstructures

摘要

Patterned SiC and SiCN microstructures were successfully fabricated on the silicon substrates by using polydimethylsiloxane (PDMS) elastometric stamp as template, polycarbosilane (PCS) and polysilazane (PSZ) as preceramic polymers. The preparing process was followed by precursor infiltration, the curing of the precursor, demolding of the template and pyrolysis of the cured preceramic polymer pattern. It shows that the dimensions of the ceramic patterns can be tailored by using the PDMS molds with different dimensions. The produced ceramic microstructures can be potentially applied in high temperature and high pressure environments due to the advanced properties of the SiC and SiCN ceramics.