A robust focusing and astigmatism correction method for the scanning electron microscope—Part II: Autocorrelation-based coarse focusing method

著录项

• 来源
  《Scanning》 |1998年第4期|324-334|共11页
• 作者

  K. H. Ong; J. C. H. Phang; J. T. L. Thong;

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• 作者单位

  Centre for Integrated Circuit Failure Analysis and Reliability (CICFAR) Faculty of Engineering National University of Singapore Singapore;

  Centre for Integrated Circuit Failure Analysis and Reliability (CICFAR) Faculty of Engineering National University of Singapore Singapore;

  Centre for Integrated Circuit Failure Analysis and Reliability (CICFAR) Faculty of Engineering National University of Singapore Singapore;

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• 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《化学文摘》(CA);
• 原文格式 PDF
• 正文语种 eng
• 中图分类
• 关键词

  focusing; scanning electron microscopy; autocorrelation; Fourier transform; automation;

  机译：聚焦;扫描电镜;自相关;傅立叶变换;自动化;