Development of Environmental Scanning Electron Microscopy Electron Beam Profile Imaging with Self-Assembled Monolayers and Secondary Ion Mass Spectroscopy

摘要

A method for demonstrating the scattering of the primary electron beam in the presence of a gas has been developed. A self-assembled decanethiol monolayer is damaged by primary beam electrons. The damaged portion of the mono-layer is exchanged with another thiol-containing molecule by immersion in solution. The resulting film is imaged using a secondary ion mass spectrometer. Three-dimensional reconstruction of the data yields a representation of scattered electrons in the gaseous environment of the environmental scanning electron microscope.