ON THE RELAXATION OSCILLATING DISCHARGES

摘要

The relaxation oscillating discharges (ROD) simulated by a simple relation between plasma resistance and plasma current of the form R = r_0 - r_1i, r_0 and r_1 being positive and inferred from measurements are presented. The obtained equation is integrated both during the charging time of a capacity mounted in parallel with the discharge and during the discharge time of the same capacity through the ignited plasma. Some experimentally obtained results in aluminium etching technology both in the case of ROD and DC discharges are comparatively presented.