High temperature fast response pressure probe for use in liquid metal droplet dispensers

摘要

A miniature fast response high temperature pressure probe, with demonstrated use in liquid metals up to 255 °C (528 K), has been developed. Innovative packaging technologies have been applied to integrate a conventional piezoresistive silicon pressure sensor into the probe, without the need of an auxiliary water-cooling system. In situ static calibrations are used to verify the linearity of the pressure signal and the stability of the pressure sensitivity (0.5% standard deviation over 70 min at 255 °C). Dynamic calibration, completed in an air shock tube facility, yields the probe's natural frequency. This frequency, when corrected for probe operation in liquid tin, is found to be 100 kHz. The reliability and accuracy of the probe is assessed by mounting it in a tin droplet dispenser for use in an extreme ultraviolet light source. Droplet dispensers typically include an excitation mechanism, which can be based on the generation of acoustic pressure waves to impose a desired droplet frequency. The probe accuracy is verified by the comparison of pressure measurements with laser Doppler vibrometry measurements of the pressure generating structure. A reference pressure measurement, conducted at representative conditions, shows a complex frequency response, with peaks distributed over three orders of magnitude and maximum amplitude of 440 mbar. Time variance of the excitation mechanism due to thermal transients is studied by monitoring the pressure response during operation. Finally, the linearity of the excitation system, with respect to the excitation amplitude, is verified by response measurements. In conclusion, the developed probe is capable of characterizing the excitation mechanism of a liquid metal droplet dispenser. Additionally, real-time monitoring of the performance of the excitation system during long-term operation is possible.