Switched charge amplifier and self-sensing circuit for piezo actuators

摘要

In some applications, it is needed to drive a plurality of piezo actuators. For example, a wafer table arranged to hold a semiconductor wafer may have several thousands of piezo uctualors to support the wafer. The piezo actuator's can deform the wafer to reduce any deformation of the wafer, for example to improve the flatness of the wafer.