Cleaner Puck for Cleaning and Maintaining Flatness of Burled Wafer Tables

摘要

Exemplary devices and methods are disclosed for improving reliability of cleaning hurled wafer tables in metrology and lithographic systems A cleaner puck is supported via three Hertzian contact pins that distribute a load evenly on the cleaner putk. Puck flatness is maintained. allowing for cleaning of the wafer table without impacting flatness specification of the wafer table and burls.