Nanometer-scale mechanical processing of muscovite mica by atomic force microscope

摘要

Atomic-scale mechanical processing of a layered crystal structure material, muscovite mica was performed using an atomic force microscope (AFM). The atomic scale processing phenomenon was evaluated from lateral force and surface atomic topographic changes caused by sliding. Above about 100nN load, grooves were formed on the damage-free mica surface. The processing depth dependence on load was evaluated. The depth of the processed grooves increased with load. Processing lateral force estimated from the torsion of the tip beam was divided into plowing force and friction force.