首页> 外国专利> PROBE FOR ATOMIC FORCE MICROSCOPE EQUIPPED WITH AN OPTOMECHANICAL RESONATOR, AND ATOMIC FORCE MICROSCOPE COMPRISING SUCH A PROBE

PROBE FOR ATOMIC FORCE MICROSCOPE EQUIPPED WITH AN OPTOMECHANICAL RESONATOR, AND ATOMIC FORCE MICROSCOPE COMPRISING SUCH A PROBE

机译:配备有光机械谐振器的原子力显微镜探针和包括这种探针的原子力显微镜

摘要

The invention relates to a probe (100) for an atomic force microscope comprising an optomechanical resonator (102) and a probe tip (103) protruding from the resonator, wherein the resonator is coupled to optical means configured to emit a light beam incident on the resonator and to receive a light beam emerging from the resonator. The optomechanical resonator comprises a body configured to resonate both in a volume mechanical vibration mode and in a volume optical vibration mode, wherein the optical vibration mode is coupled to the mechanical vibration mode such that a mechanical deformation of the resonant body in the mechanical vibration mode induces a change in the light transmission state in the optical vibration mode, which modifies the emerging light beam.
机译:本发明涉及一种用于原子力显微镜的探针(100),该探针包括光机械共振器(102)和从该共振器突出的探针尖端(103),其中该共振器耦合到光学装置,该光学装置被配置为发射入射在该光学装置上的光束。谐振器并接收从谐振器发出的光束。光学机械谐振器包括被配置为在体机械振动模式和体光学振动模式两者下谐振的主体,其中,光学振动模式耦合到机械振动模式,使得谐振体在机械振动模式下机械变形会在光学振动模式下引起光透射状态的变化,从而改变出射的光束。

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