Plasma sheath electric field strengths above a grooved electrode in a parallel-plate radio-frequency discharge

摘要

The magnitude of the sheath electric field above a grooved electrode was measured using a novel, two color, laser induced fluorescence technique. Spatially resolved electric fields in the sheath region were determined by mapping the field induced Stark splitting of the n=14 level in atomic hydrogen. Measured electric field values are in good agreement with calculated values.