Spatial and Phase-Resolved Optical Emission Patterns in Capacitively Coupled Radio-Frequency Plasmas

Nemschokmichal S.; Dittmann K.; Meichsner J.

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Spatial and Phase-Resolved Optical Emission Patterns in Capacitively Coupled Radio-Frequency Plasmas

机译：电容耦合射频等离子体中的空间和相位分辨光发射模式

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Phase-resolved optical emission spectroscopy is a powerful tool to investigate the excitation mechanisms within the radio-frequency (RF) cycle of capacitively coupled RF plasmas. In this paper, the optical emission of oxygen, hydrogen, and argon at

机译：相位分辨光发射光谱法是研究电容耦合RF等离子体的射频（RF）周期内激发机制的强大工具。在本文中，氧，氢和氩的光发射

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来源
《IEEE Transactions on Plasma Science》 |2008年第4期|p.1360-1361|共2页
作者
Nemschokmichal S.; Dittmann K.; Meichsner J.;
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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);
原文格式 PDF
正文语种 eng
中图分类等离子体物理学;
关键词
Argon; gas discharges; hydrogen; optical spectroscopy; oxygen; plasma measurements; plasma sheaths;

机译：氩;气体排放;氢气;光谱学;氧气;等离子体测量;等离子体鞘;

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Spatial and Phase-Resolved Optical Emission Patterns in Capacitively Coupled Radio-Frequency Plasmas

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