Characterization of Atmospheric-Pressure Helium–Oxygen Dual-Frequency Glow Discharges Using Optical Emission Spectroscopy

摘要

In this paper, the dual-frequency atmospheric-pressure glow discharge is operated in helium with a small amount of oxygen. It is found that the plasma density increases, but the reactive atomic oxygen density decreases with high-frequency (HF) power. The plasma density also increases with low-frequency (LF) power, but it is weak as with HF power. However, the reactive atomic oxygen density increases with LF power. It shows that HF power is in favor of excited helium, but LF power is in favor of producing reactive O, N-2, and OH. The discharge intensity decreases with oxygen gas admixture in working gas due to its electronegative nature. The generation rate of reactive oxygen atom has a trend of increasing first and then decreasing after 0.3% oxygen gas admixture.