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机译:使用微波等离子体化学气相沉积产生的Si掺杂金刚石中固有缺陷的创建和迁移
School of Materials Science and Engineering Taiyuan University of Science and Technology Taiyuan Shanxi Province China;
School of Materials Science and Engineering Taiyuan University of Science and Technology Taiyuan Shanxi Province China;
School of Materials Science and Engineering Taiyuan University of Science and Technology Taiyuan Shanxi Province China;
School of Electronic and Information Engineering Xi'an Jiaotong University Xi'an Shanxi China;
School of Materials Science and Engineering Taiyuan University of Science and Technology Taiyuan Shanxi Province China;
The Second Research Institute of China Electronic Technology Group Taiyuan Shanxi China;
School of Materials Science and Engineering Taiyuan University of Science and Technology Taiyuan Shanxi Province China;
annealing; irradiation; migration; Sidoped;
机译:微波等离子体化学气相沉积生产掺硅金刚石中本征缺陷的产生和迁移
机译:使用动力学蒙特卡洛模型和微波等离子体和热丝化学气相沉积反应器的二维模型模拟化学气相沉积金刚石膜的生长
机译:微波等离子体化学气相沉积和热丝化学气相沉积技术在硅衬底上生长金刚石薄膜的比较研究
机译:微波等离子体化学气相沉积法在多晶金刚石厚膜上制备纳米晶金刚石膜
机译:大气压微波等离子体辅助金刚石化学气相沉积中气相的化学动力学计算。
机译:微波等离子体化学气相沉积掺氮钻石。 II:CH4 / N2 / H2等离子
机译:通过微波等离子体化学气相沉积在ALN基材上的Si掺杂多晶金刚石膜的生长
机译:通过微波等离子体辅助化学气相沉积在高温下高生长率同质外延金刚石膜沉积