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Field-effect transistor performance of zinc oxide thin films derived from molecular based alkoxyalkyl zinc compounds

机译:分子基烷氧基烷基锌化合物衍生的氧化锌薄膜的场效应晶体管性能

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摘要

Solution processed zinc oxide thin films are derived from different organometallic alkoxyalkyl zinc compounds [Zn(OR_1)R_2]_4 and their performance in field-effect transistors (FETs) has been studied systematically. The influence of various residues R_1i or R_2 on the decomposition behaviour of the organometallic precursors and the resulting film morphology is discussed. The performance of the FETs could be enhanced by employment of a post-processing treatment with hydrogen plasma, leading to higher electron carrier mobilities as well as stable on/off ratios.
机译:固溶处理的氧化锌薄膜是由不同的有机金属烷氧基烷基锌化合物[Zn(OR_1)R_2] _4衍生而来的,已系统地研究了它们在场效应晶体管(FET)中的性能。讨论了各种残基R_1i或R_2对有机金属前体的分解行为和所得膜形态的影响。可以通过使用氢等离子体进行后处理来增强FET的性能,从而导致更高的电子载流子迁移率以及稳定的开/关比。

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  • 来源
    《Physica status solidi》 |2011年第7期|p.1708-1713|共6页
  • 作者单位

    Department of Chemistry, Eduard-Zintl-Institute, Inorganic Chemistry, Technische Universitat Darmstadt, Petersenstr. 18,64287 Darmstadt, Germany;

    Department of Printing Technology, Technische Universitat Darmstadt, Magdalenenstr. 2, 64283 Darmstadt, Germany;

    Department of Materials and Geosciences, Surface Science Group, Technische Universitat Darmstadt, Petersenstrasse 23,64287 Darmstadt, Germany;

    Department of Chemistry, Eduard-Zintl-Institute, Inorganic Chemistry, Technische Universitat Darmstadt, Petersenstr. 18,64287 Darmstadt, Germany;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    field-effect transistors; thin films; zno;

    机译:场效应晶体管;薄膜;兹诺;

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