Micromachining of a thin film by laser ablation using femtosecond laser with masks

摘要

A gold thin film was machined by laser ablation using a femtosecond laser with mask patterns in the shape of lines and numbers. The patterns were successfully transferred with proper focusing and laser fluence. The optimal femtosecond laser fluence to keep the line width was about 5.2 mJ/cm(2) on the mask, and 99 mJ/cm(2) on the film. The processing resolution was 13 mum, and the narrowest line width was about 4 mum. (C) 2004 Elsevier Ltd. All rights reserved.