Low-frequency Static Characterization Of Microstructures Using Acousto-optic Modulated Stroboscopic Interferometer

摘要

Micro-electro-mechanical-systems (MEMS) structures such as microcantilevers, micromirrors, accel-erometers, gyroscopes, and filters are some of the new types of integrated electro-mechanical microstructures in need of testing tools to measure precisely their static and dynamic properties. The acousto-optic-modulated-stroboscopic-interferometer (AOMSI) is an innovative tool that can be employed to investigate the above-mentioned characteristics for a given environmental condition. In this work, an optical non-contact system employing an acousto-optic-modulator (AOM) to conduct low frequency static characterization of MEMS microstructures is presented. The method is applied to a silicon-on-insulator (SOI) cantilever for demonstration purposes. The theoretical analysis is based on an energy approach. Experimental results are presented and compared with the theory, and are found to be in good agreement.