机译:倾斜莫尔条纹对邻近光刻中对准精度的影响
Institution of Optics & Electronics, Chinese Academy of Sciences, Chengdu 610209, China,School of Optoelectronic Information, University of Electronic Science and Technology of China, Chengdu 610054, China,Graduate University of Chinese Academy of Sciences, Beijing 100039, China;
Institution of Optics & Electronics, Chinese Academy of Sciences, Chengdu 610209, China;
School of Optoelectronic Information, University of Electronic Science and Technology of China, Chengdu 610054, China;
Institution of Optics & Electronics, Chinese Academy of Sciences, Chengdu 610209, China;
Information Engineering College, Southwest University of Science and Technology, Mianyang 621010, China;
Institution of Optics & Electronics, Chinese Academy of Sciences, Chengdu 610209, China,Graduate University of Chinese Academy of Sciences, Beijing 100039, China;
School of Electronic & Information, South China University of Technology, Guangzhou 510640, China;
Institution of Optics & Electronics, Chinese Academy of Sciences, Chengdu 610209, China,Graduate University of Chinese Academy of Sciences, Beijing 100039, China;
angular displacement; phase; tilt moire fringe; lithography alignment; linear displacement;
机译:使用全挠性橡皮图章和莫尔条纹技术的千分尺对准的多功能多级软光刻方法
机译:使用莫尔条纹的纳米压印光刻中的20纳米以下对准
机译:衍射莫尔条纹作为用于软光刻多层制造的分析和对准工具
机译:在数字全能中使用Moire Fringes进行光学对准
机译:光学技术在移动表面测量中的应用(莫尔条纹轮廓图,条纹分析)。
机译:脊柱骨盆定位对全髋关节置换术后骨盆倾斜的影响
机译:表征对准策略,以在高级光刻中实现可靠的对准精度
机译:RF mEms谐振器性能改进的制造工艺变化:适形接触光刻,莫尔条纹对准和氯干蚀刻