Novel high sensitivity accelerometer based on a microfiber loop resonator

摘要

Abstract. An optical accelerometer with a bulk-micromachined siliconnproof mass and a microfiber loop resonator u0001MLRu0002 sensor was devel-noped. The MLR was fixed on the surface of the cantilever beam. Thenproof mass and cantilever beam were fabricated with a two-mask pro-ncess. An accelerometer with a range of ±20 g and output sensitivityn624.7 mV/g was fabricated. The design, simulation, fabrication, and pre-nliminary results are presented. © 2010 Society of Photo-Optical InstrumentationnEngineers. u0003DOI: 10.1117/1.3294883