Energy- and angular-distributions of F~+ ions emitted from a F-terminated Si(100) surface with slow highly charged ions

摘要

Time and two-dimensional position distributions of F~+ ions emitted from a well-defined F/Si(100)-2 x 1 target were measured for impact of slow highly charged ions of 3.9 keV Ar~(5+). The time and position distributions were transformed into energy and angular distributions, which revealed that the peak emission energy was 2.0 ± 0.6 eV and the emission angle measured from the surface normal was 18 ± 4° in the (011) or (011) plane.