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Process and device for surface-modification by physico-chemical reactions of gases or vapors on surfaces, using highly-charged ions
Process and device for surface-modification by physico-chemical reactions of gases or vapors on surfaces, using highly-charged ions
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机译:使用高电荷离子通过表面上的气体或蒸气的物理化学反应进行表面改性的方法和设备
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摘要
The invention concerns a process and a device for surface- modification by physico-chemical reactions with the following steps: a) contacting a solid surface having a crystalline or amorphous structure with a reactive, gaseous fluid (gas, gas mixture, vapour or vapour mixture) which is to interact with the surface; (b) supplying activating energy to the contact area between fluid and surface by means of ions or plasmas, in order to trigger reactions between said partners. In order to improve such a process and device, the activating energy is supplied as ions having at least a double charge and low kinetic energy or plasma streams with a sufficient proportion of ions having at least a double charge and low kinetic energy. The kinetic energy imparted to the ions is selected so that it allows the ions to closely approach the surface atoms but no to enter the surface.
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