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SIMS as a new methodology to depth profile helium in as-implanted and annealed pure bcc metals?

机译:SIMS是一种新方法,能够对植入和退火后的纯密件抄送金属中的氦进行深度剖析?

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摘要

Reliable He profiles are highly desirable for better understanding helium behavior in materials for future nuclear applications. Recently, Secondary Ions Mass Spectrometry (SIMS) allowed the characterization of helium distribution in as-implanted metallic systems. The Cs~+ primary ion beam coupled with CsHe~+ molecular detector appeared to be a promising technique which overcomes the very high He ionization potential. In this study, ~4He depth profiles in pure body centered cubic (bcc) metals (V, Fe, Ta, Nb and Mo) as-implanted and annealed, were obtained by SIMS. All as-implanted samples exhibited a projected range of around 200 nm, in agreement with SRIM theoretical calculations. After annealing treatment, SIMS measurements evidenced the evolution of helium depth profile with temperature. The latter SIMS results were compared to the helium bubble distribution obtained by Transmission Electron Microscopy (TEM). This study confirmed the great potential of this experimental procedure as a He-depth profiling technique in bcc metals. Indeed, the methodology described in this work could be extended to other materials including metallic and non-metallic compounds. Nevertheless, the quantification of helium concentration after annealing treatment by SIMS remains uncertain probably due to the non-uniform ionization efficiency in samples containing large bubbles.
机译:可靠的He剖面对于更好地了解未来核应用材料中的氦行为非常有用。最近,二次离子质谱(SIMS)允许表征植入金属系统中的氦气分布。结合了CsHe〜+分子检测器的Cs〜+初级离子束似乎是克服了非常高的He电离势的有前途的技术。在这项研究中,通过SIMS获得了植入和退火的纯体中心立方(bcc)金属(V,Fe,Ta,Nb和Mo)的〜4He深度分布。与SRIM理论计算一致,所有植入的样品均显示出约200 nm的投影范围。经过退火处理后,SIMS测量结果证明了氦深度分布随温度的变化。将后者的SIMS结果与通过透射电子显微镜(TEM)获得的氦气气泡分布进行比较。这项研究证实了这种实验方法作为bcc金属中He深度轮廓分析技术的巨大潜力。确实,这项工作中描述的方法可以扩展到其他材料,包括金属和非金属化合物。然而,由于含大气泡的样品中电离效率不均匀,SIMS退火处理后的氦气浓度量化仍不确定。

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