首页> 外文期刊>Nuclear Instruments & Methods in Physics Research. Section A, Accelerators, Spectrometers, Detectors and Associated Equipment >Developing a mass-production model of large-area Si(Li) detectors with high operating temperatures
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Developing a mass-production model of large-area Si(Li) detectors with high operating temperatures

机译:开发具有高工作温度的大面积Si(Li)探测器的量产模型

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This study presents a fabrication process for lithium-drifted silicon (Si(Li)) detectors that, compared to previous methods, allows for mass production at a higher yield, while providing a large sensitive area and low leakage currents at relatively high temperatures. This design, developed for the unique requirements of the General Antiparticle Spectrometer (GAPS) experiment, has an overall diameter of 10 cm, with similar to 9 cm of active area segmented into 8 readout strips, and an overall thickness of 2.5 mm, with greater than or similar to 2.2 mm (greater than or similar to 90%) sensitive thickness. An energy resolution less than or similar to 4 keV full-width at half-maximum (FWHM) for 20-100 keV X-rays is required at the operating temperature similar to - 40 degrees C, which is far above the liquid nitrogen temperatures conventionally used to achieve fine energy resolution. High-yield production is also required for GAPS, which consists of greater than or similar to 1000 detectors. Our specially-developed Si crystal and custom methods of Li evaporation, diffusion and drifting allow for a thick, large-area and uniform sensitive layer. We find that retaining a thin undrifted layer on the p-side of the detector drastically reduces the leakage current, which is a dominant component of the energy resolution at these temperatures. A guard-ring structure and optimal etching of the detector surface are also confirmed to suppress the leakage current. We report on the mass production of these detectors that is ongoing now, and demonstrate it is capable of delivering a high yield of similar to 90%.
机译:这项研究提出了一种锂漂移硅(Si(Li))检测器的制造工艺,与以前的方法相比,该工艺可以以较高的产量进行批量生产,同时在相对较高的温度下提供大的敏感面积和低漏电流。此设计是根据通用反粒子光谱仪(GAPS)实验的独特要求而开发的,其总直径为10厘米,类似于9厘米的有效区域,分为8个读出条,总厚度为2.5毫米,更大大于或等于2.2毫米(大于或等于90%)敏感厚度。在类似于-40摄氏度的工作温度下,要求20-100 keV X射线的能量分辨率小于或等于半峰全宽4 keV(FWHM)的水平,该温度远高于常规的液氮温度用于实现精细的能量分辨率。 GAPS还需要高产量,GAPS的数量大于或等于1000个检测器。我们特别开发的Si晶体和定制的Li蒸发,扩散和漂移方法,可形成厚,大面积且均匀的敏感层。我们发现,在检测器的p侧上保留未稀释的薄层会大大减少泄漏电流,这是在这些温度下能量分辨率的主要组成部分。还确认了保护环结构和检测器表面的最佳刻蚀,可以抑制泄漏电流。我们报告了目前正在进行的这些检测器的批量生产,并证明了其能够提供接近90%的高产量。

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