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Bistability of curved microbeams actuated by fringing electrostatic fields

机译:边缘静电场引起的弯曲微光束的双稳态

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摘要

In this work we investigate the feasibility of two-directional switching of an initially curved or pre-buckled electrostatically actuated microbeams using a single electrode fabricated from the same structural layer. The distributed electrostatic force, which is engendered by the asymmetry of the fringing fields in the deformed state, acts in the direction opposite to the deflection of the beam and can be effectively viewed as a reaction of a nonlinear elastic foundation with stiffness parameterized by the voltage. The reduced order model was built using the Galerkin decomposition with linear undamped modes of a straight beam as base functions and verified using the results of the numerical solution of the differential equation. The electrostatic force was approximated by means of fitting the results of three-dimensional numerical solution of the electrostatic problem. Static stability analysis reveals that the presence of the restoring electrostatic force may result in the suppression of the snap-through instability as well as in the appearance of additional stable configurations associated with higher buckling modes of the beam that are not observed in “mechanically” loaded structures. We show that two-directional switching of a pre-buckled beam between two stable configurations cannot be achieved using quasistatic loading. Furthermore, we show that switching is both associated with the dynamic snap-through mechanism and possible within certain interval of actuation voltages. Using a single-degree-of-freedom (lumped) model, estimation voltage boundaries are obtained. Theoretical results illustrate the feasibility of the suggested operational principle as an efficient mechanism in the arena of non-volatile mechanical memory devices.
机译:在这项工作中,我们研究了使用由同一结构层制成的单个电极对初始弯曲或预弯曲的静电激励微束进行双向切换的可行性。在变形状态下由边缘场的不对称性产生的分布静电力沿与梁偏转相反的方向作用,可以有效地视为非线性弹性基础的反作用力,其刚度由电压来确定。降阶模型是使用Galerkin分解以直光束的线性无阻尼模式为基本函数建立的,并使用微分方程的数值解结果进行了验证。通过拟合静电问题的三维数值解的结果来近似静电力。静态稳定性分析表明,恢复静电力的存在可能导致抑制突跳不稳定性,以及出现与梁的更高屈曲模式相关的其他稳定配置,而在“机械”加载中没有观察到结构。我们显示了使用准静态负载无法实现两个稳定配置之间的预屈曲梁的双向切换。此外,我们表明,开关既与动态捕捉机制相关联,又可能在一定的驱动电压间隔内发生。使用单自由度(集总)模型,可以获得估计电压边界。理论结果说明了建议的操作原理作为非易失性机械存储设备领域中一种有效机制的可行性。

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