Prüfverfahren für Materialien der Mikrosystemtechnik

摘要

Standard measurement techniques which can be used to measure material properties on bulk materials are generally not able to test microstructures or microcomponents. In order to measure mechanical, tribological and thermophysical properties on the micron scale and also to analyze the chemical composition of thin film systems and microcomponents specifically developed testing methods have been applied. The experimentally determined property values can be used to proof the quality and reproducibility of the manufacturing processes and can also serve as a basis for design and optimization.