大気中での表面改質によるシリコーンとガラスの固体間直接接着法

摘要

We experimentally demonstrated the differences of surface modification effects on silicon-based polymer of soft-type silicone-rubber and hard-type silicone-resin in contact angle and bonding strength by exposure of oxygen plasma, atmospheric pressure plasma, and vacuum-ultraviolet light, in order to investigate the availability of non-vacuum process of atmospheric plasma and vacuum-ultraviolet light for high-throughput surface modifications and bonding. We also propose the use of a hard silicone-resin for Micro Electro Mechanical Systems (MEMS) and Micro-Total Analysis Systems (μ-TAS) material to overcome drawbacks of silicone-rubber, such as easy deformation and destruction of micro / nano structures caused by its softness. As a result, any modification method successfully modified the surface of both silicone-rubber and silicone-resin up to about 10° in contact angle, and bonded to glass. However, the bonding strength between silicone-resin and glass by vacuum ultraviolet light was one order of magnitude smaller than that by oxygen plasma and atmospheric plasma bonding. The results suggest that atmospheric plasma satisfies both high-speed non-vacuum process and high-efficient way for surface modification and the following bonding.%小型化による携帯性を生かした現場分析や，微細化に伴 う物理効果を生かした高速化，高効率化，高精度化によっ て，様々な化学・生化学分析のイノべ－ションを目指すマ イクロ流体デバイスの研究が盛んに行われており，微細化 のための材料や加工技術への要求はより厳しいものとなっ ている。材料に関しては，生産性の観点からエンボス加工 や射出成形などで大量生産しやすく，材料コストが安い従 来の熱可塑性や熱硬化性のプラスチックが望ましい一 方，材料コストは高くなるものの生体適合性，耐薬性，低 自家蛍光性，離型性などの化学的性質に優れるシリコーン ゴムも広く利用されている。