Design and fabrication of MEMS-based microneedle arrays for medical applications

摘要

Fabrication results for MEMS-based microneedle arrays are presented in this paper. The microneedle array was fabricated by employing a bi-mask technique to facilitate sharp tips, a cylindrical body and side openings. The presented array has advantages over previously published microneedle arrays in terms of ease of fabrication and bonding; high needle density and robustness; and side openings, which are expected to minimize the potential for clogging from skin debris during insertion. In addition, control over the process via etch-stop markers employed as stop layers, which assure the depth of long blind holes and the structure of the needle top, allows for different needle lengths and needle top structures to be easily implemented. The preliminary fluid flow and insertion experiments were performed to demonstrate the efficiency of the microneedle arrays.