Fabrication and characterization of coaxial scanning near-field optical microscopy cantilever sensors

摘要

A process scheme for the fabrication of scanning near-field optical and force microscopy cantilever sensors with coaxial tips is presented. A hollow fourfold pyramidal tip is used, coated from both sides by 100 nm aluminium. Focused Ion Beam milling is performed to structure the tips. First measurements on a model system demonstrate the performance of these sensors.