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Facilitating intermetallic formation in wire bonding by applying a pre-ultrasonic energy

机译:通过施加超声前能量促进引线键合中的金属间形成

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摘要

It is conventionally believed that wire bonding initiates at the periphery of the contact area and no bonding occurs in the central area. However, this paper demonstrated that two bonding patterns exist, and are determined by bonding processes. If a selected pre-ultrasonic energy is applied, intermetallic compounds initiate in both peripheral and central area of bonds. However, if a pre-ultrasonic energy is absent, intermetallic compounds are only present at the peripheral area as conventionally reported. The application of the pre-ultrasonic energy significantly improves bonding strength, from 66.8 to 94.5 MPa for 20 um Au wire bonds, due to the intermetallic compounds of greater structured integrity. Two different mechanisms are respectively proposed to account for the intermetallic formation in the center and periphery of the bond interface.
机译:通常认为,引线键合在接触区域的外围开始,并且在中心区域不发生键合。但是,本文证明存在两种键合模式,并由键合过程确定。如果施加选定的超声波前能量,金属间化合物会在键的外围和中心区域均引发。但是,如果没有超声波前能量,则金属间化合物仅存在于常规报道的外围区域。由于具有更好的结构完整性的金属间化合物,超声前能量的施加可将20 um Au引线键合的键合强度从66.8 MPa提高到94.5 MPa。分别提出了两种不同的机制来解释键合界面的中心和外围的金属间形成。

著录项

  • 来源
    《Microelectronic Engineering》 |2011年第10期|p.3155-3157|共3页
  • 作者单位

    Department of Metallurgical and Materials Engineering, The University of Alabama, Tuscaloosa, AL 35487, United States;

    Department of Metallurgical and Materials Engineering, The University of Alabama, Tuscaloosa, AL 35487, United States;

    Wotfson School of Mechanical and Manufacturing Engineering, Loughborough University, Loughborough LEll 3TU, United Kingdom;

    Wotfson School of Mechanical and Manufacturing Engineering, Loughborough University, Loughborough LEll 3TU, United Kingdom;

    School of Materials Science and Engineering, Nanyang Technological University, Nanyang Avenue, Singapore 639798, Singapore;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    wire bonding; intermetallic compounds; interface; ultrasonic energy; bonding mechanism;

    机译:引线键合;金属间化合物接口;超声波能量结合机制;

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