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首页> 外文期刊>Journal of Electronic Materials >The Intermetallic Compound Formation for the Wire Bond Between an Al Pad and Ag-xPd Alloy Wire
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The Intermetallic Compound Formation for the Wire Bond Between an Al Pad and Ag-xPd Alloy Wire

机译:Al垫和Ag-xPd合金线之间的焊线金属间化合物形成

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Silver-palladium alloy wire has been shown as an economical and reliable substitute for gold wire in various applications in the electronic packaging industry. The success of wire bonding relies on the formation of an interfacial intermetallic compound (IMC). This study is aimed to investigate the formation behavior of IMCs between an Al pad and Ag-Pd alloy wire with various Pd concentrations of 1.0-6.0% for the as-bonded commercial Ag/Al joint. The interfacial IMCs were investigated with scanning electron microscopy and energy-dispersive x-ray spectroscopy. The IMCs formed are separate (Ag, Pd)(2)Al and (Ag, Pd)(3)Al-2 for a Ag6Pd wire bond, while (Ag, Pd)(2)Al and (Ag, Pd)(3)Al-2 are mixed for the other Ag(1-4.5)Pd alloy wire bonds. The thickness of the total IMC layer varies from 0.65 mu m for Ag1Pd to 0.91 mu m for Ag6Pd, yet a minimum of 0.44 mu m exists for Ag3.5Pd. The compound formation behavior was found to correspond with the Ag-Al phase diagram. After pressure cooker tests, a less stable IMC (Ag, Pd)(3)Al formed at the AgxPd/Al interface.
机译:在电子包装行业的各种应用中,银钯合金线已被证明是经济,可靠的金线替代品。引线键合的成功取决于界面金属间化合物(IMC)的形成。这项研究的目的是为了研究铝键合焊盘与Ag-Pd合金丝之间的IMC的形成行为,这些键合的Pd浓度为1.0-6.0%。界面IMCs用扫描电子显微镜和能量色散x射线光谱法进行了研究。对于Ag6Pd引线键合,形成的IMC是分开的(Ag,Pd)(2)Al和(Ag,Pd)(3)Al-2,而(Ag,Pd)(2)Al和(Ag,Pd)(3 Al-2混合用于其他Ag(1-4.5)Pd合金丝焊。 IMC总层的厚度从Ag1Pd的0.65μm到Ag6Pd的0.91μm不等,而Ag3.5Pd的最小厚度为0.44μm。发现化合物的形成行为与Ag-Al相图相对应。经过压力锅测试,在AgxPd / Al界面处形成了不太稳定的IMC(Ag,Pd)(3)Al。

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