机译:注入锗的n型掺杂剂P,As和Sb扩散和活化的实验和模拟
Fraunhofer Institute for Integrated Systems and Device Technology (USB), Schottkystrasse 10, 91058 Erlangen, Germany;
Chair of Electron Devices, University Erlangen-Nuremberg, Cauerstrasse 6, 9(058 Erlangen, Germany;
Fraunhofer Institute for Integrated Systems and Device Technology (USB), Schottkystrasse 10, 91058 Erlangen, Germany, Chair of Electron Devices, University Erlangen-Nuremberg, Cauerstrasse 6, 9(058 Erlangen, Germany;
Fraunhofer Institute for Integrated Systems and Device Technology (USB), Schottkystrasse 10, 91058 Erlangen, Germany;
Fraunhofer Institute for Integrated Systems and Device Technology (USB), Schottkystrasse 10, 91058 Erlangen, Germany, Chair of Electron Devices, University Erlangen-Nuremberg, Cauerstrasse 6, 9(058 Erlangen, Germany;
Fraunhofer Institute for Integrated Systems and Device Technology (USB), Schottkystrasse 10, 91058 Erlangen, Germany;
Chair of Electron Devices, University Erlangen-Nuremberg, Cauerstrasse 6, 9(058 Erlangen, Germany,Fraunhofer Institute for Integrated Systems and Device Technology (USB), Schottkystrasse 10, 91058 Erlangen, Germany;
CEA-LETI Minatec, 17 rue des Martyrs, 38054 Grenoble Cedex 9, France;
CEA-LETI Minatec, 17 rue des Martyrs, 38054 Grenoble Cedex 9, France;
CEA-LETI Minatec, 17 rue des Martyrs, 38054 Grenoble Cedex 9, France;
nMar Group. CEMES/CNRS, 29 rue], Marvig, 31055 Toulouse Cedex, France;
germanium; n-type doping; diffusion; activation; simulation;
机译:离子注入n型掺杂剂在锗中的扩散和活化
机译:n型掺杂剂在锗中的扩散和活化
机译:锗中n型掺杂物扩散分布的定量扫描扩展电阻显微镜和掺杂物失活的起源
机译:硅锗中离子植入的N型掺杂剂的扩散行为
机译:注入的掺杂剂在砷化镓和铝(x)镓(1-x)砷中的扩散
机译:用于n型有机热电的热活化和高度易溶的掺杂剂
机译:锗中n型掺杂剂的扩散和活化